Cover
Vol. 22 No. 1 (2026)

Published: June 15, 2026

Pages: 532-539

Original Article

Design Capacitive Pressure Sensor (MEMS) with High Sensitivity and Linearity for Biomedical Application

Mokhalad Alghrairi 1 Emad Hmood Salman 2 Basim Abdul Kareem Farhan 1 Waleed Algriree 3 Hussein Mohammed Ridha 4 Saad Mutashar 5 Nasri Sulaiman 6
1 Department of Computer Techniques Engineering, Imam Alkadhim University College, Baghdad, Iraq
2 Department of Communications Engineering, College of Engineering, University of Diyala, Diyala, Iraq
3 Department of Medical Instrumentation Techniques Engineering, Dijlah University College, Baghdad, Iraq
4 Department of computer Engineering, Mustansiriyah University, Baghdad, Iraq
5 Department of Medical Instrumentation Techniques Engineering Department, Al-Mustaqbal University, Hillah, Iraq
6 Department of Electrical and Electronic Engineering, Faculty of Engineering, Universiti Putra Malaysia, Serdang 43400, Selangor, Malaysia
History
  • Received: August 23, 2024
  • Revised: September 30, 2024
  • Accepted: October 20, 2024
  • Available Online: June 15, 2026
DOI

https://doi.org/10.37917/ijeee.22.1.47

Abstract

The advancement of pressure sensors customized for purposes marks notable progress, in healthcare diagnostics and patient supervision. This article delves into creating and assessing of a capacitive pressure sensor designed to measure physiological pressures with utmost accuracy and sensitivity. The sensor’s structure integrates materials compatible with the body to ensure safety and dependability when interacting with bodily tissues. Thorough simulations and validations showcase the sensors performance emphasizing its responsiveness across various pressures in medical settings. The assessment encompasses an analysis of the sensor’s sensitivity at (12.4 fF/mmHg) exceptional linearity within a nonlinearity range of ±0.015% with a small diaphragm diameter (0.5 mm) and long-term reliability. The results indicate that the suggested capacitive pressure sensor exhibits promising possibilities for use in fields like blood pressure monitoring, intracranial pressure measurement and other crucial areas of biomedicine, providing a nonintrusive and cost-efficient method, for real-time health monitoring and diagnostic purposes.

Keywords

References

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