Cover
Vol. 6 No. 2 (2010)

Published: November 30, 2010

Pages: 167-171

Original Article

Expert System Design of beam spot size measurements in FIB system

Dr.Fadhil A.Ali 1
1Basra University- College of Engineering - Computer Engineering Department
History
  • Received: September 30, 2010
  • Available Online: November 30, 2010
DOI

https://doi.org/10.37917/ijeee.6.2.13

Abstract

This is a design of an expert system in the focused ion beam optical system by using fuzzy logic technique to build an intelligent agent. Present software has been designed as an interpretation expert system, written in Visual C# for optimizing the calculation of three electrostatic lenses column. By using such rule based engine, the axial potential distributions for electrostatic fields undergo the constraints have been used to find spot size focusing for ions in the image plane which have values are very useful for getting and designing FIB model, over ranges of ion beam angles (5, 10,30,50,75 and 100) mrad.

References

  1. Tsumagari T.,Kimata Y., Ohiwa H., and Noda T. , An optimum design of focused beam system with a beam crossover ,Jpn.Appl.Phys., vol. 27,p.L1567-L1578,1988
  2. Li-Yen Shue, Ching-Wen Chen, Weissor Shiue , The development of an ontology-based expert system for corporate financial rating , Expert Systems with Applications , Vol. 36 , Issue 2 , p. 2130-2142 , 2009
  3. Tam S. M., Kwong C. K., and Ip W. H, A hybrid artificial Computer Applications in Technology, Vol. 13, Issue 3-5, p.229236, 2000
  4. Friedman E. J., (Jess) the Rule Engine for the Java Platform, Computing Systems Sandia National Laboratories Livermore Version 6.1,4, CA USA, 2003
  5. Steve C. J., Alan W. G., David Y. Wang, and Dilworth D. C., Combination of global-optimization and expert-systems techniques
  6. Xiaogang C., Zhijiang W., Da-Jian L., and Guoliang Sun, Small expert system used in lens design, Proc. SPIE Vol. 1780,p.197-201, 1993
  7. Szilagyi M., Electron optical synthesis and optimization, Proc.
  8. Ahmad, A.K., Sabah M.J. and Ahmed A.Al-Tabbakh, Computer aided design of an electrostatic FIB system, Indian J.Phys. 76B, p.711-714, 2002
  9. Szilagyi M.,Electron and Ion Optics, Plenum Press, New York, 1988
  10. Forbes G.W., Computing spot size, J.Opt.Soc.Am. A5, 19431956, 1988
  11. Sinclair D.C. and McLaughlin P.O.,Systems with vignette pupils,Proc SPIE 55,1049,1989